Connection flange |
DN 63 CF
|
Resolution |
5 µm
|
Bakeout temperature max. |
≤ 230 °C
|
Bellows guidance necessary |
Yes, for movement without vacuum
|
Operating temperature |
-15 – 80 °C
|
Tightness |
< 1 · 10-11 Pa m³/s
|
Pressure range |
1E-10 hPa – to ambient pressure
|
Mounting orientation |
Arbitrary
|
Stroke |
300 mm
|
Inner diameter |
65 mm
|
Material |
Stainless steel (bellows: 316L, flange and tube 304L, housing 304)
|
Maximum allowable payload |
20 kg
|
Service life |
10000 cycles
|
Pitch of ball screw drive |
2 mm/Rotation
|
Repeatable precision |
5 µm
|