Z-Axis Precision Manipulator

Descriptiony

  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point

Die Filterung ergab Treffer

Technical Data

  • Resolution: 5 µm
  • Bakeout temperature: 230 °C
  • Operating temperature: -15 to 80 °C
  • Tightness: < 1 · 10-11 Pa m³/s
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Mounting orientation: Any
  • Inner diameter: DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
  • Material: Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
  • Pitch of the ball screw drive: 2 mm/rotation
  • Repeatable precision: 5 µm
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